Konstruksi dan karakterisasi reaktor plasma untuk pembuatan lapisan tipis bahan organik terpolimer

Widiyandari , Hendri (1998) Konstruksi dan karakterisasi reaktor plasma untuk pembuatan lapisan tipis bahan organik terpolimer. Undergraduate thesis, FMIPA UNDIP.

[img]PDF
Restricted to Repository staff only

2660Kb
[img]
Preview
PDF
19Kb
[img]
Preview
PDF
343Kb
[img]
Preview
PDF
557Kb
[img]
Preview
PDF
426Kb
[img]
Preview
PDF
848Kb
[img]
Preview
PDF
1047Kb
[img]PDF
Restricted to Repository staff only

1004Kb
[img]
Preview
PDF
357Kb
[img]
Preview
PDF
494Kb
[img]
Preview
PDF
341Kb

Abstract

Telah dilakukan pernbuatan sistem reaktor plasma untuk menghasilkan polimer plasma dan mendepoSisikan lapisan tipis bahan organik terpolimer sebaga.i isolator pada perangkatikOmponen dengan susunan L-I-S (logam-isolator-semikonduktor). Reaktor ini terdiri dari tip komponen utarna yaitu ruang deposisi, surnber daya radio freknensi dan sistem \Tatum]. Reaktor plasma yang telah diperoleh mampu menghasilkan plasma yang relatif stabil. dan mudah diatur dengar.P. daya lucutan (60 4- 5) watt. fi-ekuevsi keluaran osilator RF (10,280, ± 0,005) MHz, tegangan pendorong (200 + 10) volt dan jangkau tekanan untuk proses pelapisan (2,0 ± 0,1) mbar hingga (3,2 ± 0,1) mbar sebagai vaniabel optimal gum: pengoperasiannya. A Plasma. reactor was constructed to produce the polymer plasma and used to deposit thin organic films polimerized as insulator in metal-insulator¬semiconductor (M-I-S) deviCe structure. This plasma reactor 'consist of three-main parts, i.e: deposition chamber, RF power generator sources and vacuum system. Result shows that, he plasma rector able to produce stable plasMa relatively and an-angable with an discharge power of (60 + 5) wait, RF oscillator frequency of (10,280 + 0,005) MHz, extraction voltage of (200 -I- 10) vol; and interval of pressure for depOsition process was (2,0 -4- 0,1) mbar to (3,2 + 0,1) mbar was found to be optimuM.

Item Type:Thesis (Undergraduate)
Subjects:Q Science > QC Physics
Divisions:Faculty of Science and Mathematics > Department of Physics
ID Code:30408
Deposited By:Mr UPT Perpus 1
Deposited On:28 Oct 2011 11:52
Last Modified:28 Oct 2011 11:52

Repository Staff Only: item control page