Optimasi Daerah Slip pada Permukaan Bertekstur pada Pelumasan MEMS (Micro Electro Mechanical Systems)

Abstract

Micro Electro Mechanical Systems (MEMS) is an electro-mechanical structure equipment that consists of micro sensor and another supporting visual in micro scale. To decrease the friction force between the surfaces in the MEMS, a lubricant is highly needed. The main problem of lubrication in MEMS is the stiction. Stiction is the process of adhering one surface to another surface. Stiction causes a damage of component in MEMS because it can not move normally. One of the methods to prevent stiction is by modifying the surface. In numerical solution, this work uses finite difference methods. In mathematics, finite-difference methods are numerical methods for approximating the solutions to differential equations using finite difference equations to approximate derivatives. In the present study, a numerical analysis of a sliding contact with such an engineered slip/noslip surface is analyzed. Slip is assumed to occur when a critical shear stress is exceeded and follows the Navier relation. The result shows that with critical shear stress of zero, a significant increase in load support and decrease in friction can be achieved with an appropriate surface pattern. Optimization of region slip will more increase load support. The addition of textured surface in the slip region will increase load support.