PENENTUAN TEBAL BAHAN TRANSPARAN (ZnO) MENGGUNAKAN INTERFEROMETER MICHELSON

Abstract

Thickness determination of ZnO transparent material on a substrate (microscope slide) by using Michelson Interferometer has been carried out. Materials which used in the research were a microscope slide, which thickness of 1 mm, and ZnO transparent material on a 1 mm microscope slide. Refractive index of the microscope slide and the thickness of ZnO were measured by counting the fringes transitions as the materials rotated large as f , on the other words, fringes transitions N as function of sinus incident angles f of laser ray, N º N(sinf ). Incident angles of laser ray, which are used in the measurement of refractive index of microscope slide and of ZnO transparent material thickness on microscope slide, are 1°, 2°, 3°, 4°, 5°, 6°, 7°, 8°, 9°, dan 10°. Laser ray used in this research was He-Ne laser, which has l = 633 nm and its output power was < 1 mW. The results of this research show that there were N fringes transitions as research-materials rotated large as f . Those measured fringes transitions still have remarkable agreement with the theoretical fringes transitions, by which has to be compared. As the incident angles get bigger, the fringes transitions N get bigger too. The thickness of the ZnO thin film, which was resulted from the research, was (6.0 ± 1.8) × 10-5 m.